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TECHNICAL DATA |
Mode | ZZ-1214 | ZZ-1416 | ZZ-1618 | ZZ-1820 |
Dimension (D*H) | 1200*1400mm | 1400*1600mm | 1600*1800mm | 1800*2000mm |
Film type | Semitransparent film, non-conducting film, gold, silver, red, blue, green, purple, seven color, etc | |||
Power source | Thermal evaporation power, ion bombard power, RF power | |||
Vacuum chamber structure | Vertical double/single door, horizontal single door, pump system postposition | |||
Ultimate vacuum | 8.0*10-4Pa | |||
Vacuum system | Diffusion pump +Roots pump +Mechanical pump +Holding pump | |||
Pump time | Pump from atmosphere to 5.0*10-2,<=6 minutes | |||
Workpiece motion mode | Public rotation/ Frequency control | |||
Control mode | Manual/Automatic all in one mode, Touch screen + PLC | |||
Remark | We can design the dimension of the equipment according to customers special technique requirement. |