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Technical Specification
Mode | LH-1215 | LH-1618 | LH-2121 |
Dimension | D1250*H1500mm | D1600*H1800mm | D2100*H2100m |
Coating mode and | Twelve arc targets | Eighteen arc targets | Twenty two arc targets |
Power source | Electric-arc power, Filament power, Pulsed bias power supply | ||
Process gas control | Mass flowmeter + Electromagnetic ceramic valve | ||
Vacuum chamber | Vertical side opening door, pump system postposition, double water cooling | ||
Vacuum system | Diffusion pump +Roots pump +Mechanical pump(5.0*10-4Pa) | ||
Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. | ||
Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | ||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa | ||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | ||
Remark | We can design the dimension of the equipment according to customers special technique requirement. |